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(10092) ActiveX Automation: server cannot create object

I want create an MScommLib.MSComm object to control stages and I can see it in the Object Browser. But while excuting the macro it always appears the error message "(10092) ActiveX Automation: server cannot create object." Does anyone have idea what's going wrong? My software version is 7.0.0.591 and OS is windows 7 32bit

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